Khoom
Non Evaporable Getter (NEG) Pumps
Nta thiab Daim Ntawv Thov NEG twj tso kua mis yog ib hom chemisorption twj tso kua mis, uas tau sib sau ua ke tom qab NEG alloy rhuab los ntawm siab sintering, Nws tuaj yeem tshem tawm ntau cov roj seem hauv lub tshuab nqus tsev, feem ntau siv rau UHV kuaj lossis cov cuab yeej Lab. Thaum nws tau qhib NEG twj tso kua mis ...
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Kos npe
Nta thiab Daim Ntawv Thov
NEG twj tso kua mis yog ib hom chemisorption twj tso kua mis, uas sib sau ua ke tom qab lub NEG alloy rhuab los ntawm high sintering, Nws yuav tshem tawm ntau npaum li cas ntawm cov residual gases nyob rau hauv ib tug nqus tsev vacuum ib puag ncig, feem ntau yog thov rau UHV kuaj los yog Lab khoom. Thaum nws tau qhib NEG twj tso kua mis tuaj yeem ua haujlwm yam tsis muaj lub zog, tsis muaj kev vibration thiab Nonmagnetic. Qhov tseem ceeb ntawm NEG twj tso kua mis nws muaj txiaj ntsig zoo rau Hydrogen thiab lwm yam roj hluav taws xob, thiab yuav tsis txo qis hauv UHV.
Cov yam ntxwv yooj yim thiab cov ntaub ntawv dav dav
| Yam khoom | Qhov ntev ntawm Cartridge (mm) | Qhov hnyav (g) | Flange loj | Ua kom muaj zog (W) | Ua kom kub kub (℃) | Reactivations (sorption voj voog) |
| NP-TMKZ-100 | 62 | 18 | CF 35 | 25 | 450 | ≥100 |
| NP-TMKZ-200 | 88 | 35 | CF 35 | 45 | 450 | ≥100 |
| NP-TMKZ-400 | 135 | 70 | CF 35 | 85 | 450 | ≥100 |
| NP-TMKZ-1000 | 142 | 180 | CF63 ua | 220 | 450 | ≥100 |
| NP-TMKZ-1600 | 145 | 420 | CF100/CF150 | 450 | 450 | ≥100 |
| NP-TMKZ-2000 | 195 | 630 | CF100/CF150 | 680 | 450 | ≥100 |
| Yam khoom | Pumping ceev (L / S) | Sorption Peev Xwm (Torr × L) | ||||||
| H2 | H2O | N2 | CO | H2 | H2O | N2 | CO | |
| NP-TMKZ-100 | 100 | 75 | 25 | 45 | 600 | 5 | 0.175 ib | 0.35 Nws |
| NP-TMKZ-200 | 200 | 145 | 45 | 90 | 1160 | 10 | 0.35 Nws | 0.7 ua |
| NP-TMKZ-400 | 400 | 290 | 95 | 180 | Xyoo 1920 | 20 | 0.7 ua | 1.4 |
| NP-TMKZ-1000 | 800 | 580 | 185 | 360 | 5600 ib | 50 | 1.7 | 3.5 |
| NP-TMKZ-1600 | 1600 | 1160 | 370 | 7 20 | 11520 ib | 120 | 4 | 8 |
| NP-TMKZ-2000 | 2000 | 1450 | 450 | 900 | 17280 ib | 180 | 6 | 12 |
Pom zoo ua kom cov xwm txheej
Nws raug nquahu kom tus neeg siv siv lub zog tam sim no los ua kom muaj zog thiab qhib NEG Pump. Kev pom zoo ua kom muaj zog: Kev ua kom muaj zog ntawm 450 ° C rau 45min, lub tshuab nqus tsev kawm ntawv hauv tag nrho cov txheej txheem ntawm kev ua kom muaj zog yuav tsum zoo dua 0.01Pa. Kev ncua sij hawm kom zoo yuav pab txhawb kev ua kom tag nrho ntawm NEG Pump. Yog hais tias tus txheej txheem ua kom kub tsis tuaj yeem ncav cuag, lub sijhawm ua kom yuav tsum tau txuas ntxiv kom them rov qab. Nws yog ib qho tsim nyog los xyuas kom meej lub tshuab nqus tsev nqus tsev vacuum chamber thaum lub sij hawm ua kom cov txheej txheem, yog tias lub tshuab nqus tsev qis dhau lawm, cov teeb meem hauv qab no yuav tshwm sim: lub tshuab cua sov sputtering, nqus cov khoom ua paug, qhov kub thiab txias thiab lwm yam tsis zoo.
Lub NEG Pump tso tawm qee cov pa roj thaum lub sijhawm ua haujlwm, txhawm rau ua kom lub tshuab nqus tsev nqus thaum ua kom NEG Pump. Peb pom zoo tias NEG Pump yuav tsum tau qhib rau hauv lub tshuab nqus tsev dynamic, thiab cov txheej txheem ua kom yuav tsum maj mam thiab maj mam nce los ntawm 1.5A kom txog rau thaum tus nqi tam sim no tau txiav txim siab, qhov deflation sai thiab kev hloov hluav taws xob tsis zoo tshwm sim los ntawm kev hloov pauv sai. Qhov kub ntawm NEG Pump yuav tsum zam.
Ceev faj
Thaum qhib thiab ua haujlwm, NEG Pump casing thiab flange muaj qhov kub thiab txias, xyuam xim tiv thaiv kev kub nyhiab.
Thaum NEG Pump yog qhov kub thiab txias, nws yuav tsum nyob rau hauv lub tshuab nqus tsev kom tsis txhob ua tsis tiav vim muaj kev sib kis thiab noj.
Thaum txuas cov khoom siv hluav taws xob, xyuas kom meej tias kev sib txuas ntawm cov khoom siv hluav taws xob thiab cov flange electrode yog ruaj khov, thiab xyuam xim rau cov rwb thaiv tsev nrog lwm qhov chaw.
Ua ntej ua kom cua sov, ua tib zoo xyuas kom ntseeg tau tias lub kaw lus nyob rau hauv lub tshuab nqus tsev uas ua tau raws li qhov yuav tsum tau ua.
Nyob rau hauv cov xwm txheej tshwj xeeb, txhawm rau ua kom lub NEG Pump muaj lub siab nqus ceev rau C, N, O thiab lwm yam roj, qhov kub thiab txias ua haujlwm tuaj yeem tswj tau nyob rau hauv thaj tsam ntawm 200 ° C ~ 250 ° C (energized 2.5A), hauv qhov no yog qhov kawg ntawm lub tshuab nqus tsev uas lub NEG Pump tuaj yeem ua tiav tau txo qis.
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