Ibicuruzwa
Kubona firime nziza
Ibiranga nibisabwa Iki gicuruzwa ni firime yoroheje ya titanium cyangwa zirconium ivanze hamwe na microstructure nziza ishobora gukoreshwa hejuru yubushyuhe bwinshi. Nyuma yo gukora, irashobora gukuramo imyuka yanduye nka hydrogène, imyuka y'amazi, monoxyde de carbone, dioxyde de carbone nizindi impuri ...
Ibisobanuro
Shyira umukono
Ibiranga na Porogaramu
Ibicuruzwa ni firime yoroheje ya titanium cyangwa zirconium alloy hamwe na microstructure nziza ishobora gukoreshwa hejuru yubushyuhe bugari. Nyuma yo gukora, irashobora gukuramo imyuka yanduye nka hydrogène, umwuka wamazi, monoxyde de carbone, dioxyde de carbone nizindi myuka yanduye itari gaze ya inert mubidukikije, kandi igateza imbere kandi igakomeza icyuho kiri mubikoresho. Ifite ibiranga ubushobozi bunini bwo guhumeka, nta bice, n'ubushyuhe buke bwo gukora. Irashobora gukoreshwa cyane mubikoresho bitandukanye bya MEMS nka sensor ya infrared sensor na Micro giroscope. Amavuta atandukanye ya getter arahari kubikorwa bitandukanye.
Ibiranga shingiro hamwe namakuru rusange
Imiterere
Imiterere isanzwe yibicuruzwa nicyuma kitagira umwanda gifite ubugari bwa microne 50 nkuwitwara, kandi hejuru yubatswe hejuru kumpande zombi, hamwe na firime yuburebure bwa microni 1.5. Ingano yubunini irashobora gutegurwa ukurikije ibyo abakoresha bakeneye. Irashobora kandi kubikwa muburyo bwa firime yoroheje hejuru ya wafer cyangwa ibyapa bitandukanye bitwikiriye ibyuma hamwe nigikonoshwa ceramic.
Ubushobozi bwa Sorption
Nyuma yuko ibicuruzwa bimaze gukorerwa mumashanyarazi maremare ari munsi ya 1E-3Pa, irashobora kugira ubushobozi bwo guswera, kandi nyuma yo gukonjesha ubushyuhe bwicyumba, iracyafite ubushobozi bwo kwamamaza imyuka itandukanye ikora. Mugihe ubushyuhe bwo gukora bwiyongera, ubushobozi bwo guhumeka bwiyongera buhoro buhoro. Igicuruzwa gishyuha ku bushyuhe bwiza bwo gukora kuri 30min, kandi ubushobozi bwa adsorption ya CO nyuma yo gukonja burenze 0.06Pa · L / cm2。 Iyo ubushyuhe bwo gukora burenze ubushyuhe bwiza bwo gukora, imikorere imwe yo guhumeka nyuma yo gukonja iba yiyongereye.
Iyo ibicuruzwa bitangijwe no gushyushya mu cyuho gito, imyuka ikora mubidukikije itangira kwinjizwa mugihe cyo gushyushya. Kuri gaze zitandukanye, umuvuduko wacyo nubushobozi biratandukanye. Ku bushyuhe runaka no mubipimo byubushobozi bwo kwinjiza byose, igipimo cyambere cyo kwihuta kirihuta, hanyuma kizagenda gahoro; Iyo ubushyuhe bwongeye kuzamuka, igipimo cyo kwinjiza cyongera kwiyongera hanyuma kikongera. Nyuma yo gukonjesha, niba ibicuruzwa bifite ubushobozi bwo guswera biterwa nubwoko bwa gaze ikora ifata nubunini bwo guhumeka.
Basabwe gukora ibikorwa
Kugirango ukore neza, gukora muri vacuum ya dinamike iri munsi ya 1E-3Pa birasabwa, kandi ibisabwa kugirango ibikorwa byo gukora kuri buri bikoresho bya firime byerekanwe kurutonde rukurikira ：
| Ibikoresho bya firime | Ubushyuhe nigihe (℃ × min) |
| TP | 450 × 30 |
| TZC | 300 × 30 |
| TZCF | 400 × 30 |
Icyitonderwa
Ubushyuhe bugezweho-bwogukora ubushyuhe butangwa mugusobanura ibicuruzwa bipimishwa nigicuruzwa kimanitse mu cyuho, kandi ubushyuhe bwogukora nubushyuhe biterwa ahanini no gutakaza ubushyuhe nyuma yuko ibicuruzwa bigurishijwe imbere mubikoresho. Bitewe nubushyuhe bwumwanya wo gusudira, ubushyuhe bwigice cyo gusudira buri munsi cyane yubushyuhe bwigice cyo hagati cyibicuruzwa.
Mugihe cyo gukora, getter irekura imbere imbere ya hydrogène ikomeye. Niba hari amazi mubidukikije, ogisijeni mumazi izashyirwaho na getter, hanyuma hydrogène yibanze izahindurwa gaze ya hydrogène kugirango irekurwe. Mu mwanya ufunzwe, nyuma yo gukonja, niba iki gice cya hydrogène gishobora kwinjizwa rwose na getter biterwa nubwoko nubunini bwa gaze ikuramo mugihe cyo gukora.
twandikire
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