Sehlahisoa
Li-filimi tse nyane
Likarolo le Lisebelisoa Sehlahisoa sena ke filimi e tšesaane ea titanium kapa alloy ea zirconium e nang le optimized microstructure e ka sebelisoang ho latela mocheso o pharaletseng. Kamora ho kenya tšebetsong, e ka monya likhase tse litšila tse kang hydrogen, mouoane oa metsi, carbon monoxide, carbon dioxide le litšila tse ling ...
Tlhaloso
Letshoao
Likarolo le Lisebelisoa
Sehlahisoa sena ke filimi e tšesaane ea titanium kapa alloy ea zirconium e nang le microstructure e ntlafalitsoeng e ka sebelisoang ka mefuta e mengata ea mocheso. Ka mor'a ho sebetsa, e ka monya likhase tse sa hloekang tse kang hydrogen, mouoane oa metsi, carbon monoxide, carbon dioxide le likhase tse ling tse sa hloekang ntle le khase ea inert tikolohong ea vacuum, 'me ea ntlafatsa le ho boloka vacuum ka hare ho sesebelisoa. E na le litšoaneleho tsa bokhoni bo boholo ba pululelo, ha e na likaroloana, le mocheso o tlase oa ts'ebetso. E ka sebelisoa haholo lisebelisoa tse fapaneng tsa MEMS tse kang li-sensor tsa infrared le Micro gyroscope. Li-alloys tse fapaneng tsa getter li fumaneha bakeng sa lits'ebetso tse fapaneng tsa encapsulation.
Litšobotsi tsa Motheo le Boitsebiso bo Akaretsang
Sebopeho
Sebopeho se tloaelehileng sa sehlahisoa ke tšepe e sa hloekang e nang le botenya ba li-microns tse 50 e le sejari, 'me bokaholimo bo koahetsoe ka mahlakoreng ka bobeli, ka botenya ba filimi bo ka bang 1,5 microns. Sebopeho sa boholo se ka etsoa ho latela litlhoko tsa mosebedisi. E ka boela ea behoa ka mokhoa oa lifilimi tse tšesaane holim'a sephaphatha kapa lipoleiti tse sa tšoaneng tsa sekoahelo sa tšepe le likhetla tsa ceramic.
Matla a Sorption
Kamora hore sehlahisoa se kenngoe ka har'a vacuum e matla e tlase ho 1E-3Pa, e ka ba le bokhoni ba ho monya, 'me ka mor'a ho pholile ho isa mocheso oa kamore, e ntse e na le bokhoni ba ho adsorb likhase tse fapaneng tse sebetsang. Ha mocheso oa ts'ebetso o ntse o eketseha, matla a ho susumetsa a eketseha butle-butle. Sehlahisoa se futhumatsoa ka mocheso o nepahetseng oa ho kenya ts'ebetsong bakeng sa 30min, 'me matla a adsorption a CO ka mor'a ho pholile a feta 0.06Pa· L/cm2. Ha mocheso oa ts'ebetso o feta mocheso o nepahetseng oa ts'ebetso, ts'ebetso e le 'ngoe ea ho inhalation ka mor'a hore ho pholile e fokotsehe.
Ha sehlahisoa se sebelisoa ka ho futhumatsa ka har'a sephahla se tlaase, likhase tse sebetsang tikolohong li qala ho kenngoa nakong ea ho futhumatsa. Bakeng sa likhase tse fapaneng, lebelo la ho monya le matla a eona li fapane. Ka mocheso o itseng le ka har'a mefuta eohle ea matla a ho monya, tekanyo ea pele ea ho monya e potlakile, 'me joale e tla ba butle le butle; Ha mocheso o phahamisoa hape, sekhahla sa ho monya sea eketseha hape ebe se fokotseha hape. Ka mor'a ho pholile, hore na sehlahisoa se na le matla a ho hula a setseng ho itšetlehile ka mofuta oa khase e sebetsang eo e e monyang le boholo ba ho hema.
Maemo a khothaletsoang a ho kenya tšebetsong
Bakeng sa ts'ebetso e ntle ka ho fetisisa, ho khothaletsoa ho kenya ts'ebetso ea vacuum e matla e ka tlase ho 1E-3Pa, 'me maemo a khothaletsoang a sesebelisoa ka seng a bonts'oa lenaneng le latelang:
| Boitsebiso ba Filimi | Mocheso le Nako(℃×min) |
| TP | 450×30 |
| TZC | 300×30 |
| TZCF | 400×30 |
Tlhokomeliso
Mocheso oa mocheso oa hona joale oa mocheso o fanoeng ho Tlhaloso ea Sehlahisoa o lekoa ke sehlahisoa se leketlileng ka har'a vacuum, 'me ts'ebetso ea sebele ea hona joale khahlanong le mocheso e itšetlehile haholo ka tahlehelo ea mocheso ka mor'a hore sehlahisoa se rekisoe ka hare ho sesebelisoa. Ka lebaka la mocheso oa mocheso oa boemo ba welding, mocheso oa karolo ea welded o tlase haholo ho feta mocheso oa karolo e bohareng ea sehlahisoa.
Nakong ea ts'ebetso, getter e tla lokolla hydrogen e qhibilihang ka hare ka hare. Haeba ho na le metsi tikolohong, oksijene e ka metsing e tla lokisoa ke getter, 'me elemental hydrogen e tla fetoloa khase ea hydrogen hore e lokolloe. Sebakeng se koaletsoeng, ka mor'a ho pholile, hore na karolo ena ea hydrogen e ka kenngoa ka ho feletseng ke getter e itšetlehile ka mofuta le boholo ba khase eo e e nkang nakong ea ts'ebetso.
iteanye le rona
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